Enriching libraries of high-aspect-ratio micro- or nanostructures by rapid, low-cost, benchtop nanofabrication

Citation:

Kim P, Adorno-Martinez WE, Khan M, and Aizenberg J. Enriching libraries of high-aspect-ratio micro- or nanostructures by rapid, low-cost, benchtop nanofabrication. Nature Protocols. 2012;7 (2) :311–327.
2012_Kim_natprot.pdf3.05 MB

Notes:

This work was partially supported by the US Department of Energy, Office of Basic Energy Sciences and the Division of Materials Science and Engineering, under award no. DE-SC0005247 (design of HAR structures); the US Army Research Office Multidisciplinary University Research Initiative under award no. W911NF-09-1-0476 (electrodeposition and mechanical properties); and the US Air Force Office of Scientific Research Multidisciplinary University Research Initiative under award no. FA9550-09-1-0669-DOD35CAP (optical properties). This work was carried out in part through the use of the Massachusetts Institute of Technology’s Microsystems Technology Laboratories. Part of this work was also performed at the Center for Nanoscale Systems at Harvard University, a member of the National Nanotechnology Infrastructure Network, which is supported by the National Science Foundation (NSF) under NSF award no. ECS-0335765. W.E.A.-M. thanks REU BRIDGE, co-funded by the ASSURE program of the Department of Defense in partnership with the National Science Foundation REU Site program under NSF grant no. DMR-1005022. We thank J.C. Weaver for help in manuscript preparation and E. Macomber for technical assistance with metal deposition equipment.
Last updated on 06/08/2016