Patterning Disorder in Monolayer Resists for the Fabrication of sub-100-nm Structures in Silver, Gold, Silicon, and Aluminum
Publication information:
Black AJ, Paul KE, Aizenberg J, Whitesides GM. Patterning Disorder in Monolayer Resists for the Fabrication of sub-100-nm Structures in Silver, Gold, Silicon, and Aluminum. J. Am. Chem. Soc. 1999;121:8356–8365.