Ultraviolet Lithography of Self-Assembled Monolayers for Submicron Patterned Deposition

Publication information:

Friebel S, Aizenberg J, Abad S, Wiltzius P. Ultraviolet Lithography of Self-Assembled Monolayers for Submicron Patterned Deposition. Appl. Phys. Lett. 2000;77:2406–2408.